Semiconductor device and method of manufacturing same

ABSTRACT

A semiconductor device comprising: a transistor region formed on a semiconductor substrate and having a plurality of memory cell arrays formed of a plurality of memory cell transistors and select transistors one each of which is disposed on one and the other sides of said plurality of memory cell transistors; a diffused layer formed on the surface of said semiconductor substrate between the adjacent first and a second select transistors of said memory cell arrays in said transistor region; a first sidewall film formed on each of the opposed sidewalls of said first and second select transistors adjacent to each other; a second sidewall film formed on said first sidewall film; and a conducting layer formed between said first and second select transistors, so as to contact with said diffused layer, wherein the edge of a contact portion is positioned at a distance no less than the thickness of said second sidewall film from the sidewalls of said first and second select transistors.

CROSS REFERENCE TO RELATED APPLICATION

This application is based upon and claims benefit of priority from theJapanese Patent Application No. 2006-285301, filed on Oct. 19, 2006, theentire contents of which are incorporated herein by reference.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to a semiconductor device and a method ofmanufacturing the same.

2. Related Art

Along with the miniaturization of semiconductor devices, it is desiredto also miniaturize contacts for electrically connecting theimpurity-diffused layer of a semiconductor substrate with a wiring lineor the like.

As a manufacturing method advantageous to miniaturization, there isknown a method including:

forming a diffused layer on the principal surface of a semiconductorsubstrate between select gate electrodes formed thereon;

forming a first barrier film on the sidewalls of the select gateelectrodes and on the diffused layer;

forming a first insulating layer on the first barrier film;

forming silicide layers on the select gate electrodes;

forming a second barrier film on the silicide layers and on the firstinsulating layer;

forming an opening having a first width in the second barrier film onthe diffused layer;

forming a second insulating layer on the second barrier film;

forming a mask layer on the second insulating layer;

forming an opening having a second width larger than the first width inthe mask layer on the opening;

forming the upper portion of a contact hole having a bottom as wide asthe second width by carrying out etching using the mask layer as a mask;

forming in the second barrier film the lower portion of the contact holehaving a first width W1 and being as deep as to penetrate through thefirst insulating layer and the first barrier film and reach the diffusedlayer by starting etching from the position of the opening; and

burying a conducting layer in the upper and lower portions of thecontact hole, thereby forming a contact.

In addition, in order to reduce the resistance of bit line contacts of aNAND-type flash memory, there is known a method of forming alow-concentration impurity-diffused layer on the surface of asemiconductor substrate between select transistors, forming ahigh-concentration impurity-diffused layer in the center of thislow-concentration impurity-diffused layer, creating a contact hole onthe high-concentration impurity-diffused layer, and burying a Ti/TiNlaminated barrier metal film and a tungsten (W) film in the contacthole, thereby forming a bit line contact.

When forming such a bit line contact using such a method as describedabove, there may arise a displacement in the position where an openinghaving a first width W1 is to be formed due to misalignment inlithography, thereby causing part of the bottom surface of the bit linecontact to protrude out of the high-concentration impurity-diffusedlayer into the low-concentration impurity-diffused layer.

The above-described method thus has the problem that if such protrusioninto the low-concentration impurity-diffused layer as described aboveoccurs, Ti and the substrate (silicon) react with each other in thelow-concentration impurity-diffused layer to form a Ti silicide whenfilling the contact hole with the Ti/TiN laminated barrier metal filmand the W film, resulting in junction leakage, since thelow-concentration impurity-diffused layer is designed to be shallowerthan the high-concentration impurity-diffused layer.

The method also has the problem that bit line leakage occurs since adepletion layer is formed on the surface of the low-concentrationimpurity-diffused layer in the vicinity of the select transistors due tothe electric fields thereof and a Ti silicide is formed in thisdepletion layer.

These problems can be avoided by reducing the size of the contacts(contact holes) or by increasing the distance between the select gateelectrodes. However, reducing the size of contacts is makes it difficultto ensure a sufficient lithographic margin when forming a resist patternfor contacts in lithography, thereby leading to a decrease in the yield.Furthermore, increasing the distance between the select gate electrodesinvolves an increase in the chip size, resulting in a decrease in thenumber of chips produced from a single wafer.

SUMMARY OF THE INVENTION

According to one aspect of the present invention, there is provided asemiconductor device comprising:

a semiconductor substrate;

a transistor region formed on said semiconductor substrate and having aplurality of memory cell arrays formed of a plurality of memory celltransistors and select transistors one each of which is disposed on oneand the other sides of said plurality of memory cell transistors;

a diffused layer formed on the surface of said semiconductor substratebetween the adjacent first and a second select transistors of saidmemory cell arrays in said transistor region;

a first sidewall film formed on each of the opposed sidewalls of saidfirst and second select transistors adjacent to each other;

a second sidewall film formed on said first sidewall film; and

a conducting layer formed between said first and second selecttransistors, so as to contact with said diffused layer, wherein the edgeof a contact portion is positioned at a distance no less than thethickness of said second sidewall film from the sidewalls of said firstand second select transistors.

According to one aspect of the present invention, there is provided amethod of manufacturing a semiconductor device comprising:

forming on a semiconductor substrate a plurality of memory cell arrayshaving a plurality of memory cell transistors and select transistors oneeach of which is disposed on one and the other sides of said pluralityof memory cell transistors;

forming a first diffused layer on the surface of said semiconductorsubstrate between said memory cell transistors, between said memory celltransistors and said select transistors and between said selecttransistors disposed at the ends of said memory cell arrays adjacent toeach other;

forming a first insulating film so as to fill spaces between said memorycell transistors, between said memory cell transistors and said selecttransistors and between said select transistors disposed at the ends ofsaid memory cell arrays adjacent to each other;

removing said first insulating film so that sidewall films having afirst predetermined value of film thickness are formed between saidselect transistors on the sidewall thereof;

forming a second diffused layer on the surface of said semiconductorsubstrate between said select transistors using said sidewall films asmasks;

removing said sidewall films;

forming a second insulating film for covering the side and bottomsurfaces of an area between said select transistors;

forming third insulating films on the lateral sides of said secondinsulating film so that the total thickness of said third insulatingfilm and said second insulating film amounts to a second predeterminedvalue equal to or greater than said first predetermined value;

forming a fourth insulating film so as to fill a space between saidthird insulating films;

creating an opening between said select transistors whereby the topsurface of said second diffused layer is exposed; and

burying a conductive material in said opening to form a contact portion.

According to one aspect of the present invention, there is provided amethod of manufacturing a semiconductor device comprising:

forming on a semiconductor substrate a plurality of memory cell arrayshaving a plurality of memory cell transistors and select transistors oneeach of which is disposed on one and the other sides of said pluralityof memory cell transistors;

forming a first diffused layer on the surface of said semiconductorsubstrate between said memory cell transistors, between said memory celltransistors and said select transistors and between said selecttransistors disposed at the ends of said memory cell arrays adjacent toeach other;

forming a first insulating film so as to fill spaces between said memorycell transistors, between said memory cell transistors and said selecttransistors and between said select transistors disposed at the ends ofsaid memory cell arrays adjacent to each other;

removing said first insulating film so that sidewall films having afirst predetermined value of film thickness are formed between saidselect transistors on the sidewall thereof;

forming a second diffused layer on the surface of said semiconductorsubstrate between said select transistors using said sidewall films asmasks;

forming a second insulating film so as to fill a space between saidsidewall films;

removing said sidewall films and said second insulating film so that thepredetermined heights thereof are reached;

forming a third insulating film having a second predetermined value offilm thickness equal to or greater than said first predetermined valueby covering the side surface and bottom surface of an area between saidselect transistors;

forming a fourth insulating film on said third insulating film so as tofill a space between said select transistors;

creating an opening between said select transistors whereby the topsurface of said second diffused layer is exposed; and

burying a conductive material in said opening to form a contact portion.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a schematic view showing a cross-sectional process drawing ofa method of manufacturing a semiconductor device in accordance with thefirst embodiment of the present invention;

FIG. 2 is a schematic view showing another cross-sectional processdrawing of a method of manufacturing the semiconductor device inaccordance with the first embodiment of the present invention;

FIG. 3 is a schematic view showing yet another cross-sectional processdrawing of a method of manufacturing the semiconductor device inaccordance with the first embodiment of the present invention;

FIG. 4 is a schematic view showing still another cross-sectional processdrawing of a method of manufacturing the semiconductor device inaccordance with the first embodiment of the present invention;

FIG. 5 is a schematic view showing still another cross-sectional processdrawing of a method of manufacturing the semiconductor device inaccordance with the first embodiment of the present invention;

FIG. 6 is a schematic view showing still another cross-sectional processdrawing of a method of manufacturing the semiconductor device inaccordance with the first embodiment of the present invention;

FIG. 7 is a schematic view showing still another cross-sectional processdrawing of a method of manufacturing the semiconductor device inaccordance with the first embodiment of the present invention;

FIG. 8 is a schematic view showing still another cross-sectional processdrawing of a method of manufacturing the semiconductor device inaccordance with the first embodiment of the present invention;

FIG. 9 is a schematic view showing still another cross-sectional processdrawing of a method of manufacturing the semiconductor device inaccordance with the first embodiment of the present invention;

FIG. 10 is a schematic view showing still another cross-sectionalprocess drawing of a method of manufacturing the semiconductor device inaccordance with the first embodiment of the present invention;

FIG. 11 is a schematic view showing still another cross-sectionalprocess drawing of a method of manufacturing the semiconductor device inaccordance with the first embodiment of the present invention;

FIG. 12 is a schematic view showing still another cross-sectionalprocess drawing of a method of manufacturing the semiconductor device inaccordance with the first embodiment of the present invention;

FIG. 13 is a schematic view showing still another cross-sectionalprocess drawing of a method of manufacturing the semiconductor device inaccordance with the first embodiment of the present invention;

FIG. 14 is a schematic view showing still another cross-sectionalprocess drawing of a method of manufacturing the semiconductor device inaccordance with the first embodiment of the present invention;

FIG. 15 is a schematic view showing still another cross-sectionalprocess drawing of a method of manufacturing the semiconductor device inaccordance with the first embodiment of the present invention;

FIG. 16 is a schematic view showing a cross-sectional process drawing ofa method of manufacturing a semiconductor device according to acomparative example;

FIG. 17 is a schematic view showing another cross-sectional processdrawing of a method of manufacturing the semiconductor device accordingto a comparative example;

FIG. 18 is a schematic view showing a cross-sectional process drawing ofa method of manufacturing a semiconductor device in accordance with thesecond embodiment of the present invention;

FIG. 19 is a schematic view showing another cross-sectional processdrawing of a method of manufacturing the semiconductor device inaccordance with the second embodiment of the present invention;

FIG. 20 is a schematic view showing yet another cross-sectional processdrawing of a method of manufacturing the semiconductor device inaccordance with the second embodiment of the present invention;

FIG. 21 is a schematic view showing still another cross-sectionalprocess drawing of a method of manufacturing the semiconductor device inaccordance with the second embodiment of the present invention;

FIG. 22 is a schematic view showing still another cross-sectionalprocess drawing of a method of manufacturing the semiconductor device inaccordance with the second embodiment of the present invention;

FIG. 23 is a schematic view showing still another cross-sectionalprocess drawing of a method of manufacturing the semiconductor device inaccordance with the second embodiment of the present invention;

FIG. 24 is a schematic view showing still another cross-sectionalprocess drawing of a method of manufacturing the semiconductor device inaccordance with the second embodiment of the present invention;

FIG. 25 is a schematic view showing still another cross-sectionalprocess drawing of a method of manufacturing the semiconductor device inaccordance with the second embodiment of the present invention;

FIG. 26 is a schematic view showing a cross-sectional process drawing ofa method of manufacturing a semiconductor device in accordance with thethird embodiment of the present invention;

FIG. 27 is a schematic view showing another cross-sectional processdrawing of a method of manufacturing the semiconductor device inaccordance with the third embodiment of the present invention;

FIG. 28 is a schematic view showing yet another cross-sectional processdrawing of a method of manufacturing the semiconductor device inaccordance with the third embodiment of the present invention;

FIG. 29 is a schematic view showing still another cross-sectionalprocess drawing of a method of manufacturing the semiconductor device inaccordance with the third embodiment of the present invention;

FIG. 30 is a schematic view showing still another cross-sectionalprocess drawing of a method of manufacturing the semiconductor device inaccordance with the third embodiment of the present invention;

FIG. 31 is a schematic view showing still another cross-sectionalprocess drawing of a method of manufacturing the semiconductor device inaccordance with the third embodiment of the present invention;

FIG. 32 is a schematic view showing still another cross-sectionalprocess drawing of a method of manufacturing the semiconductor device inaccordance with the third embodiment of the present invention;

FIG. 33 is a schematic view showing still another cross-sectionalprocess drawing of a method of manufacturing the semiconductor device inaccordance with the third embodiment of the present invention;

FIG. 34 is a schematic view showing still another cross-sectionalprocess drawing of a method of manufacturing the semiconductor device inaccordance with the third embodiment of the present invention;

FIG. 35 is a schematic view showing still another cross-sectionalprocess drawing of a method of manufacturing the semiconductor device inaccordance with the third embodiment of the present invention;

FIG. 36 is a schematic view showing still another cross-sectionalprocess drawing of a method of manufacturing the semiconductor device inaccordance with the third embodiment of the present invention; and

FIG. 37 is a schematic view showing still another cross-sectionalprocess drawing of a method of manufacturing the semiconductor device inaccordance with the third embodiment of the present invention.

DESCRIPTION OF THE EMBODIMENTS

Hereinafter, an explanation will be made of a semiconductor device and amethod of manufacturing the semiconductor device in accordance with theembodiments of the present invention with reference to the accompanyingdrawings.

First Embodiment

Now, an explanation will be made of a method of manufacturing asemiconductor device in accordance with the first embodiment of thepresent invention using FIGS. 1 to 15.

First, as shown in FIG. 1, there are formed on a silicon substrate 100 aplurality of cell arrays CA, in which one each of select transistors 2is disposed on one and the other side of a plurality of memory celltransistors 1, using a publicly-known process. There are also formedperipheral transistors and element-isolating regions (both are not shownin the figure).

Each memory cell transistor 1 has a tunnel-insulating film 3 on thesilicon substrate 100, a floating gate electrode 4 formed ofpolysilicon, an inter-poly insulating film 5, and a control gateelectrode 6 formed of polysilicon.

In addition, a silicon nitride film 7 is overlaid on the control gateelectrode 6 as a hard mask material used at the time of processing. Thefilm thicknesses of the floating gate electrode 4, inter-poly insulatingfilm 5, control gate electrode 6, and silicon nitride film 7 are, forexample, 90 nm, 15 nm, 150 nm and 50 nm, respectively.

While the select transistors 2 and the peripheral transistors are thesame in configuration as the memory cell transistors 1, an opening 101is formed in part of each inter-poly insulating film 5, therebyconnecting the floating gate electrode 4 and the control gate electrode6 to each other to form a gate electrode 102.

In addition, a low-concentration impurity-diffused layer 8 is formed onthe surface of the semiconductor substrate 100 between respectivetransistors by performing ion implantation using the floating gateelectrodes 4 and the control gate electrodes 6 as masks.

In a cell array portion where the memory cell transistors 1 and theselect transistor 2 are formed, the low-concentration impurity-diffusedlayer 8 is formed by ion-implanting P or As as an impurity at a dosageof, for example, 1E13/cm². In a peripheral circuit area where theperipheral transistors are formed, the low-concentrationimpurity-diffused layer 8 is formed by ion-implanting P, As or B as animpurity, depending on the type of transistors, at a dosage of, forexample, 1E11 to 1E13/cm².

The distances between the memory cell transistors 1 and between eachplurality of memory cell transistors 1 and each select transistor 2 are,for example, 55 nm, and the distance between the select transistors 2is, for example, 300 nm.

As shown in FIG. 2, a silicon dioxide film 9 is deposited using a CVDmethod to fill spaces between the memory cell transistors 1, betweeneach select transistor 2 and each plurality of memory cell transistors1, and between the select transistors 2. Then, spacers 9′ are formedbetween the select transistors 2 on the lateral sides thereof by etchingback the silicon dioxide film 9 using a dry etching method. The spacers9′ are likewise formed in the peripheral circuit area (not shown in thefigure). The width L of the spacers 9′ is, for example, 50 nm.

Then, a high-concentration impurity-diffused layer 10 is formed betweenthe select transistors 2 and in the peripheral circuit area byperforming ion implantation. In an area between the select transistors 2and in N-type peripheral transistors, the high-concentrationimpurity-diffused layer 10 is formed by ion-implanting As at a dosageof, for example, 1E15/cm². In P-type peripheral transistors, thehigh-concentration impurity-diffused layer 10 is formed byion-implanting B at a dosage of, for example, 1E15/cm².

As shown in FIG. 3, the spacers 9′ formed on the lateral sides of theselect transistors 2 are removed using a photolithography method and awet etching method.

Then, a silicon nitride film 11 having a thickness of, for example, 20nm is deposited so as to cover the top surfaces of the memory celltransistors 1, the select transistors 2, each silicon dioxide film 9between the memory cell transistors 1, each silicon dioxide film 9between each plurality of memory cell transistors 1 and each selecttransistor 2, and the side surfaces and the bottom surface of an areabetween the select transistors 2.

As shown in FIG. 4, a silicon dioxide film 12 is deposited using a CVDmethod, so as to fill an area between the select transistors 2, and thesilicon dioxide film 12 is planarized by means of CMP using the siliconnitride film 11 as a stopper film.

As shown in FIG. 5, the silicon nitride films 7 and 11 and the silicondioxide films 9 and 12 are removed using a dry etching method, so as toexpose the top surfaces of the control gate electrodes 6 of the memorycell transistors 1 and the gate electrodes 102 of the select transistors2 and peripheral transistors.

As shown in FIG. 6, part of the silicon dioxide film 12 buried betweenthe select transistors 2 is removed using a lithography method and a wetetching or dry etching method.

As shown in FIG. 7, a silicide film 13 formed of titanium (Ti), cobalt(Co), nickel (Ni), or the like is formed on the top surfaces of exposedpolysilicon (control gate electrodes 6 and gate electrodes 102) using apublicly-known salicide technique.

In addition, a silicon nitride film 14 is deposited using a CVD method,so as to cover the top surfaces of the silicon dioxide films 9, selecttransistors 2 and memory cell transistors 1 and the side surfaces(surface of the silicon nitride film 11) and the bottom surface (topsurface of the silicon dioxide film 12) of an area between the selecttransistors 2.

Consequently, a vertical step 17 formed of silicon nitride film isformed between the select transistors 2. The height of the vertical step17 is controlled by the amount of silicon dioxide film 12 etched inpreceding processes.

Assuming here that the distance from the sidewall of each selecttransistor 2 to the vertical surface of the vertical step 17 (totalthickness of the silicon nitride films 11 and 14) is D1 and the distancefrom the side surface of each select transistor 2 to the end of thehigh-concentration impurity-diffused layer 10 (region the impurityconcentration of which is higher than that of the low-concentrationimpurity-diffused layer 8) is D2, the silicon nitride film 14 isdeposited so that D1≧D2 holds true.

Assuming that the width L of the spacer 9′ serving as a mask whenforming the high-concentration impurity-diffused layer 10 is 50 nm, forexample, then D2≈50 nm. Assuming that the thickness of the siliconnitride film 11 is 20 nm, then the distance D1≈60 (=20+40) nm issatisfied by depositing the silicon nitride film 14 to a thickness of 40nm and, therefore, D1≧D2 holds true.

As shown in FIG. 8, a silicon dioxide film 15 is deposited so as to filla space between the select transistors 2.

As shown in FIG. 9, a contact hole 103 is created between the selecttransistors 2 using lithography and dry etching methods. At the time ofdry etching, the silicon dioxide film 15 is first etched under theetching condition (defined as condition 1) that a silicon dioxide filmhas a higher selection ratio than a silicon nitride film.

Then, the silicon nitride film 14 is etched under the etching condition(defined as condition 2) that a silicon nitride film has a higherselection ratio than a silicon dioxide film. Next, the silicon dioxidefilm 12 is etched under condition 1. Then, the silicon nitride film 11is etched under condition 2 to expose the top surface of thehigh-concentration impurity-diffused layer 10. Note that this series ofetching may be carried out within the same chamber.

As shown in FIG. 10, for example, if the position to create a contacthole in is displaced due to misalignment in lithography, the etching ofthe silicon dioxide film 15 proceeds as far as the top surface of thesilicon nitride film 14 on the select transistors 2 with this positionof contact hole creation kept displaced.

Since etching is carried out under the etching condition that a silicondioxide film has a higher selection ratio than a silicon nitride film,the part P1 of the vertical step 17 is subsequently etched away, asshown in FIG. 11, while the etching of the silicon dioxide film 15proceeds as far as the top surface of the silicon nitride film 14between the select transistors 2.

The etched away amount of this part P1 is smaller than that of thesilicon dioxide film 15 due to a difference in the selection ratio.

As shown in FIG. 12, if the silicon nitride film 14 is etched under theetching condition that a silicon nitride film has a higher selectionratio than a silicon dioxide film, the part P1 of the vertical stepetched away in preceding processes is likewise deepened further byetching while etching proceeds as far as the top surface of the silicondioxide film 12.

As shown in FIG. 13, the silicon dioxide film 12 is etched under theetching condition that a silicon dioxide film has a higher selectionratio than a silicon nitride film. The part P1 of the vertical step 17is etched away further while the etching of the silicon dioxide film 12proceeds as far as the top surface of the silicon nitride film 11between the select transistors 2.

However, the amount etched away here is smaller than that of the silicondioxide film 12 due to a difference in the selection ratio. In addition,only the part P1 of the vertical step 17 is etched away and, thus, thedistance D1 of the vertical surface thereof from the side surface ofeach select transistor 2 is still maintained at the base of the verticalstep 17.

Accordingly, the region where the silicon dioxide film 12 has beenetched away also has the distance D1 or greater from the side surface ofeach select transistor 2.

As shown in FIG. 14, if the silicon nitride film 11 is etched under theetching condition that a silicon nitride film has a higher selectionratio than a silicon dioxide film, the part P1 of the vertical stepalready etched away in preceding processes is likewise deepened furtherby etching while etching proceeds as far as the top surface of thehigh-concentration impurity-diffused layer 10.

Since the region where the silicon dioxide film has been etched away inpreceding processes has the distance D1 or greater from the side surfaceof each select transistor 2, the silicon nitride film 11 removed at thispoint also has the distance D1 or greater from the side surface of eachselect transistor 2.

Then, as shown in FIG. 15, a Ti/TiN laminated barrier metal film and a Wfilm are buried using a publicly-known technique in the contact hole 103created by the above-described etching and planarized using a CMPmethod, thereby forming a bit line contact 104.

By keeping the height of the vertical step 17 sufficiently larger thanthe total thickness of the silicon nitride film 11 and the siliconnitride film 14, it is possible to prevent the bit line contact fromprotruding out of the high-concentration impurity-diffused layer 10.This is because the base of the vertical step 17 remains at thecompletion of etching and, therefore, the region where the siliconnitride film 11 is etched away never comes closer to the selecttransistor 2 than the vertical surface of the vertical step 17 havingthe distance D1 from the side surface of each select transistor 2.

Comparative Example

Now, an explanation will be made of a method of manufacturing asemiconductor device according to a comparative example. The comparativeexample is the same as the above-described first embodiment up to theprocess of removing the silicon nitride film 7 and parts of the siliconnitride film 11 and the silicon dioxide films 9 and 12 to expose thesurfaces of the control gate electrodes 6 of the memory cell transistors1 and the surfaces of the polysilicon films 102 for wiring the gates ofthe select transistors and peripheral transistors using the dry etchingmethod illustrated in FIGS. 1 to 5 and, therefore, will not be explainedfurther with respect to these processes.

As shown in FIG. 16, a silicide film 23 formed of Ti, Co or Ni is formedon the surface of polysilicon exposed using a publicly-known salicidetechnique, a silicon nitride film 24 is deposited using a CVD method,and a silicon dioxide film 25 is further deposited also using a CVDmethod.

Using lithography and dry etching methods, a contact hole is createdbetween the select transistors 2. If the position to create a contacthole in is displaced due to misalignment in lithography, as shown inFIG. 17, part of the base of a bit line contact protrudes into thelow-concentration impurity-diffused layer 8 when the bit line contact isformed by burying a Ti/TiN laminated barrier metal film and a W film inthis contact hole.

Since the low-concentration impurity-diffused layer 8 is designed to beshallower than the high-concentration impurity-diffused layer 10, Ti andthe substrate (silicon) react with each other in the low-concentrationimpurity-diffused layer 8 to form a Ti silicide when filling the contacthole with the Ti/TiN laminated barrier metal film and the W film,resulting in junction leakage.

In addition, a depletion layer is formed on the surface of thelow-concentration impurity-diffused layer 8 near the select transistors2 due to electric fields thereof and a Ti silicide is formed in thedepletion layer, resulting in bit line leakage.

As described above, the method of manufacturing a semiconductor deviceaccording to the comparative example will lead to the low reliability ofmanufactured semiconductor devices. As measures against this problem, itis conceivable to reduce the size of the contact (contact hole) orincrease the distance between the select transistors 2. However,reducing the size of the contact hole makes it difficult to ensure asufficient lithographic margin when forming a resist pattern forcontacts in lithography, thereby leading to a decrease in the yield.Furthermore, increasing the distance between the select transistors 2involves an increase in the chip size, resulting in a decrease in thenumber of chips produced from a single wafer.

On the other hand, in the method of manufacturing a semiconductor devicein accordance with the above-described first embodiment of the presentinvention, it is possible to prevent the base of the bit line contactfrom protruding out of the high-concentration impurity-diffused layer,without increasing the distance between the select transistors and whileensuring a sufficient lithographic margin.

Second Embodiment

Now, an explanation will be made of a method of manufacturing asemiconductor device in accordance with the second embodiment of thepresent invention using FIGS. 18 to 25. The second embodiment is thesame as the above-described first embodiment up to the process ofremoving the silicon nitride film 7 and parts of the silicon nitridefilm 11 and the silicon dioxide films 9 and 12 to expose the surfaces ofthe control gate electrodes 6 of the memory cell transistors 1 and thesurfaces of the polysilicon films 102 for wiring the gates of the selecttransistors and peripheral transistors, using the dry etching methodillustrated in FIGS. 1 to 5 and, therefore, will not be explainedfurther with respect to these processes.

As shown in FIG. 18, the silicon dioxide film 12 buried between theselect transistors 2 is entirely removed using a lithography method anda wet etching or dry etching method with the silicon nitride film 11used as a stopper film. The present embodiment differs from theabove-described first embodiment, wherein only part of the silicondioxide film 12 is removed as shown in FIG. 6, in that the silicondioxide film 12 is removed entirely.

As shown in FIG. 19, a silicide film 13 formed of titanium (Ti), cobalt(Co) or nickel (Ni) is formed on the top surface of exposed polysilicon(control gate electrodes 6 and gate electrodes 102) using apublicly-known salicide technique.

In addition, a silicon nitride film 14 is deposited using a CVD method,so as to cover the top surfaces of the silicon dioxide film 9, memorycell transistors 1 and select transistors 2 and the side surfaces andthe bottom surface of an area between the select transistors 2.Consequently, a vertical step 17 formed of a silicon nitride film isformed on the lateral sides of the select transistors 2.

Assuming here that the distance from the side surface of each selecttransistor 2 to the vertical surface of the vertical step 17 (totalthickness of the silicon nitride films 11 and 14) is D1 and the distancefrom the side surface of each select transistor 2 to the end of thehigh-concentration impurity-diffused layer 10 (region the impurityconcentration of which is higher than that of the low-concentrationimpurity-diffused layer 8) is D2, the silicon nitride film 14 isdeposited so that D1≧D2 holds true. The thickness of the silicon nitridefilm 14 is, for example, 40 nm.

As shown in FIG. 20, a silicon dioxide film 15 is deposited so as tofill a space between the select transistors 2.

As shown in FIG. 21, a contact hole 103 is created between the selecttransistors 2 using lithography and dry etching methods. At the time ofdry etching, the silicon dioxide film 15 is first etched under theetching condition that a silicon dioxide film has a higher selectionratio than a silicon nitride film.

Next, the silicon nitride film 14 and the silicon nitride film 11 areetched under the etching condition that a silicon nitride film has ahigher selection ratio than a silicon dioxide film. Note that thisseries of etching may be carried out within the same chamber.

As shown in FIG. 22, for example, if the position to create a contacthole in is displaced due to misalignment in lithography, the etching ofthe silicon dioxide film 15 proceeds as far as the top surface of thesilicon nitride film 14 on the select transistors 2 with this positionof contact hole creation kept displaced.

Since etching is carried out under the etching condition that a silicondioxide film has a higher selection ratio than a silicon nitride film,the part P2 of the vertical step 17 is subsequently etched away, asshown in FIG. 23, while the etching of the silicon dioxide film 15proceeds as far as the top surface of the silicon nitride film 14between the select transistors 2. The etched away amount of this part P2is smaller than that of the silicon dioxide film 15 due to a differencein the selection ratio.

Then, as shown in FIG. 24, if the silicon nitride films 14 and 11 areetched under the etching condition that a silicon nitride film has ahigher selection ratio than a silicon dioxide film, the part P2 of thevertical step etched away in preceding processes is likewise deepenedfurther by etching while etching proceeds as far as the top surface ofthe high-concentration impurity-diffused layer 10.

Since the region where the silicon dioxide film has been etched away inpreceding processes has the distance D1 or greater from the side surfaceof each select transistor 2, the silicon nitride films 14 and 11 removedat this point also have the distance D1 or greater from the side surfaceof each select transistor 2.

Then, as shown in FIG. 25, a Ti/TiN laminated barrier metal film and a Wfilm are buried using a publicly-known technique in the contact holecreated by the above-described etching, thereby forming a bit linecontact 104.

Consequently, the base of the vertical step 17 remains at the completionof etching and, therefore, the region where the silicon nitride films 14and 11 are etched away never comes closer to the select transistors 2than the vertical surface of the vertical step 17 having the distance D1from the side surface of each select transistor 2. Accordingly, it ispossible to prevent the bit line contact from protruding out of thehigh-concentration impurity-diffused layer 10.

As described above, according to the method of manufacturing asemiconductor device in accordance with the above-described secondembodiment of the present invention, it is possible to prevent the baseof the bit line contact from protruding out of the high-concentrationimpurity-diffused layer without increasing the distance between theselect transistors and while ensuring a sufficient lithographic margin.

In the present embodiment, since it is possible to ensure the verticalstep 17 to be significantly high, compared with the case in theabove-described first embodiment, it is easy to leave over the base ofthe vertical step 17 at the time of etching to create a contact hole. Inaddition, it is possible to reduce the frequency of switching betweenetching conditions, compared with the case in the above-described firstembodiment.

Furthermore, in the present embodiment, etching never proceeds deep intothe element-isolating region even if the silicon nitride films, whenetched, do not have a sufficiently high selection ratio with respect tothe silicon dioxide films, since there is no need to etch silicondioxide films after having etched the silicon nitride films 14 and 11.

However, in the present embodiment, care must be taken to prevent voidsfrom arising during deposition, since the aspect ratio of an areabetween the select transistors 2 increases when the silicon dioxide film15 is deposited.

Third Embodiment

Now, an explanation will be made of a method of manufacturing asemiconductor device in accordance with the third embodiment of thepresent invention using FIGS. 26 to 37. The third embodiment is the sameas the above-described first embodiment up to the process of depositinga silicon dioxide film 9 using the CVD method illustrated in FIGS. 1 and2, forming spacers 9′ on the lateral sides of select transistors 2 byetching back the silicon dioxide film 9 using a dry etching method, andforming a high-concentration impurity-diffused layer 10 between theselect transistors 2 and in peripheral transistors using lithography andion implantation methods and, therefore, will not be explained furtherwith respect to these processes.

As shown in FIG. 26, a silicon dioxide film 12 is deposited using a CVDmethod, so as to fill a space between the select transistors 2 andplanarized using a CMP method with the silicon nitride film 7 used as astopper film.

As shown in FIG. 27, the silicon nitride film 7 and parts of the silicondioxide films 9 (9′) and 12 are removed, so as to expose the topsurfaces of the control gate electrodes 6 of the memory cell transistors1 and the gate electrodes 102 of the select transistors 2 and peripheraltransistors using a dry etching method.

As shown in FIG. 28, a silicide film 13 formed of titanium (Ti), cobalt(Co), nickel (Ni) or the like is formed on the top surface ofpolysilicon (control gate electrodes 6 and gate electrodes 102) exposedusing a publicly-known salicide technique.

As shown in FIG. 29, parts of the silicon dioxide film 12 and thesilicon dioxide films 9 (spacers 9′) buried between the selecttransistors 2 are removed using lithography and dry etching methods.

As shown in FIG. 30, a silicon nitride film 14 is deposited to athickness of, for example, 60 nm using a CVD method, so as to cover thetop surfaces of the silicon dioxide film 9, memory cell transistors 1and select transistors 2 and the side surfaces and the bottom surface(top surfaces of the spacers 9′ and the silicon dioxide film 12) of anarea between the select transistors 2, to form a vertical step 17.

Assuming here that the distance from the side surface of each selecttransistor 2 to the vertical surface of the vertical step 17 (thicknessof the silicon nitride film 14) is D1 and the distance from the sidesurface of each select transistor 2 to the end of the high-concentrationimpurity-diffused layer 10 (region the impurity concentration of whichis higher than that of the low-concentration impurity-diffused layer 8)is D2, the silicon nitride film 14 is deposited so that D1≧D2 holdstrue.

As shown in FIG. 31, a silicon dioxide film 15 is deposited using a CVDmethod, so as to fill a space between the select transistors 2.

As shown in FIG. 32, a contact hole 103 is created between the selecttransistors 2 using lithography and dry etching methods. At the time ofdry etching, the silicon dioxide film 15 is first etched under theetching condition (defined as condition 1) that a silicon dioxide filmhas a higher selection ratio than a silicon nitride film.

Next, the silicon nitride film 14 is etched under the etching conditionthat a silicon nitride film has a higher selection ratio than a silicondioxide film.

Then, the silicon dioxide film 12 is etched under condition 1 to exposethe top surface of the high-concentration impurity-diffused layer 10.Note that this series of etching may be carried out within the samechamber.

As shown in FIG. 33, for example, if the position to create a contacthole in is displaced due to misalignment in lithography, the etching ofthe silicon dioxide film 15 proceeds as far as the top surface of thesilicon nitride film 14 on the select transistors 2 with this positionof contact hole creation kept displaced.

Since etching is carried out under the etching condition that a silicondioxide film has a higher selection ratio than a silicon nitride film,the part P3 of the vertical step 17 is subsequently etched away, asshown in FIG. 34, while the etching of the silicon dioxide film 15proceeds as far as the top surface of the silicon nitride film 14between the select transistors 2. The etched away amount of this part P3is smaller than that of the silicon dioxide film 15 due to a differencein the selection ratio.

As shown in FIG. 35, if the silicon nitride film 14 is etched under theetching condition that a silicon nitride film has a higher selectionratio than a silicon dioxide film, the part P3 of the vertical stepetched away in preceding processes is likewise deepened further byetching while etching proceeds as far as the top surface of the silicondioxide film 12.

As shown in FIG. 36, the silicon dioxide film 12 is etched under theetching condition that a silicon dioxide film has a higher selectionratio than a silicon nitride film. The part P3 of the vertical step 17is etched away further while the etching of the silicon dioxide film 12proceeds. However, the amount etched away here is smaller than that ofthe silicon dioxide film 12 due to a difference in the selection ratio.

In addition, only the part P3 of the vertical step 17 is etched away andthus the distance D1 of the vertical surface thereof from the sidesurface of each select transistor 2 is still maintained at the base ofthe vertical step 17. Accordingly, the region where the silicon dioxidefilm 12 has been etched away also has the distance D1 or greater fromthe side surface of each select transistor 2.

Then, as shown in FIG. 37, a Ti/TiN laminated barrier metal film and a Wfilm are buried using a publicly-known technique in the contact holecreated by the above-described etching, thereby forming a bit linecontact 104.

Sine the base of the contact hole to be created has a distance D1 fromthe side surface of each select transistor 2, the bit line contact doesnot protrude out of the high-concentration impurity-diffused layer 10.

As described above, according to the method of manufacturing asemiconductor device in accordance with the third embodiment of thepresent invention, it is possible to prevent the base of the bit linecontact from protruding out of the high-concentration impurity-diffusedlayer without increasing the distance between the select transistors andwhile ensuring a sufficient lithographic margin.

The present embodiment, when compared with the above-described firstembodiment, does not require the process of removing the spacers 9′formed on the lateral sides of the select transistors 2 and makes itpossible to eliminate one process in which a silicon dioxide film isformed. Consequently, it is possible to reduce manufacturing costs.

In the present embodiment, although no stopper films (silicon nitridefilm 11 in the above-described first embodiment) are present when thesilicon dioxide film 12 is etched, it is possible to prevent etchingfrom proceeding deep into the element-isolating region by correctlysetting the amount of overetch.

1. A semiconductor device comprising: a semiconductor substrate; atransistor region formed on said semiconductor substrate and having aplurality of memory cell arrays formed of a plurality of memory celltransistors and select transistors one each of which is disposed on oneand the other sides of said plurality of memory cell transistors; adiffused layer formed on the surface of said semiconductor substratebetween the adjacent first and a second select transistors of saidmemory cell arrays in said transistor region; a first sidewall filmformed on each of the opposed sidewalls of said first and second selecttransistors adjacent to each other; a second sidewall film formed onsaid first sidewall film; and a conducting layer formed between saidfirst and second select transistors, so as to contact with said diffusedlayer, wherein the edge of a contact portion is positioned at a distanceno less than the thickness of said second sidewall film from thesidewalls of said first and second select transistors.
 2. Thesemiconductor device according to claim 1, wherein the thickness of saidsecond sidewall film is greater than the thickness of said firstsidewall film.
 3. The semiconductor device according to claim 1, whereinsaid first sidewall film is a silicon dioxide film and said secondsidewall film is a silicon nitride film.
 4. The semiconductor deviceaccording to claim 1, wherein said diffused layer has a firstimpurity-diffused layer region and a second impurity-diffused layerregion formed in the center thereof and having an impurity concentrationhigher than that of said first impurity-diffused layer region.
 5. Thesemiconductor device according to claim 4, wherein said conducting layercontacts with said second impurity-diffused layer region.
 6. Thesemiconductor device according to claim 1, wherein said second sidewallfilm is formed so as to cover at least part of the top surface and theside surface of said first sidewall film, wherein the edge of saidcontact portion is positioned at a distance no less than the totalthickness of said first and second sidewall films from the sidewalls ofsaid first and second select transistors.
 7. The semiconductor deviceaccording to claim 6, wherein the height of said second sidewall film isgreater than the sum of the thicknesses of said first sidewall film andsaid second sidewall film.
 8. The semiconductor device according toclaim 6, wherein said diffused layer has a first impurity-diffused layerregion and a second impurity-diffused layer region formed in the centerthereof and having an impurity concentration higher than that of saidfirst impurity-diffused layer region.
 9. The semiconductor deviceaccording to claim 8, wherein said conducting layer contacts with saidsecond impurity-diffused layer region.
 10. The semiconductor deviceaccording to claim 6, wherein said first sidewall film and said secondsidewall film are silicon nitride films.
 11. A method of manufacturing asemiconductor device comprising: forming on a semiconductor substrate aplurality of memory cell arrays having a plurality of memory celltransistors and select transistors one each of which is disposed on oneand the other sides of said plurality of memory cell transistors;forming a first diffused layer on the surface of said semiconductorsubstrate between said memory cell transistors, between said memory celltransistors and said select transistors and between said selecttransistors disposed at the ends of said memory cell arrays adjacent toeach other; forming a first insulating film so as to fill spaces betweensaid memory cell transistors, between said memory cell transistors andsaid select transistors and between said select transistors disposed atthe ends of said memory cell arrays adjacent to each other; removingsaid first insulating film so that sidewall films having a firstpredetermined value of film thickness are formed between said selecttransistors on the sidewall thereof; forming a second diffused layer onthe surface of said semiconductor substrate between said selecttransistors using said sidewall films as masks; removing said sidewallfilms; forming a second insulating film for covering the side and bottomsurfaces of an area between said select transistors; forming thirdinsulating films on the lateral sides of said second insulating film sothat the total thickness of said third insulating film and said secondinsulating film amounts to a second predetermined value equal to orgreater than said first predetermined value; forming a fourth insulatingfilm so as to fill a space between said third insulating films; creatingan opening between said select transistors whereby the top surface ofsaid second diffused layer is exposed; and burying a conductive materialin said opening to form a contact portion.
 12. The method ofmanufacturing a semiconductor device according to claim 11, wherein saidthird insulating films are also formed on the lateral sides and on thebase of said second insulating film.
 13. The method of manufacturing asemiconductor device according to claim 12, wherein said opening isformed by etching said fourth insulating film on the condition that saidfourth insulating film has a higher selection ratio than said thirdinsulating films so that the top surface of the base of said thirdinsulating films is exposed and by etching said third and secondinsulating films on the condition that said third insulating films havea higher selection ratio than said fourth insulating film so that thetop surface of said second diffused layer is exposed.
 14. The method ofmanufacturing a semiconductor device according to claim 12, wherein saidsecond and third insulating films are silicon nitride films and saidfourth insulating film is a silicon dioxide film.
 15. The method ofmanufacturing a semiconductor device according to claim 11, furtherincluding, between forming said second insulating film and forming saidthird insulating film, forming a fifth insulating film on said secondinsulating film so as to fill a space between said select transistors upto a predetermined height and forming said third insulating film on thelateral sides of said second insulating film and on said fifthinsulating film.
 16. The method of manufacturing a semiconductor deviceaccording to claim 15, wherein said opening is formed by etching saidfourth insulating film on the condition that said fourth insulating filmhas a higher selection ratio than said third insulating films so thatthe top surface of the base of said third insulating films is exposed,by etching said third insulating film on the condition that said thirdinsulating film has a higher selection ratio than said fourth insulatingfilm so that the top surface of said fifth insulating film is exposed,by etching said fifth insulating film on the condition that said fifthinsulating film has a higher selection ratio than said third insulatingfilm so that the top surface of the base of said second insulating filmis exposed, and by etching said second insulating film on the conditionthat said second insulating film has a higher selection ratio than saidfifth insulating film so that the top surface of said second diffusedlayer is exposed.
 17. The method of manufacturing a semiconductor deviceaccording to claim 15, wherein said second and third insulating filmsare silicon nitride films and said fourth and fifth insulating films aresilicon dioxide films.
 18. A method of manufacturing a semiconductordevice comprising: forming on a semiconductor substrate a plurality ofmemory cell arrays having a plurality of memory cell transistors andselect transistors one each of which is disposed on one and the othersides of said plurality of memory cell transistors; forming a firstdiffused layer on the surface of said semiconductor substrate betweensaid memory cell transistors, between said memory cell transistors andsaid select transistors and between said select transistors disposed atthe ends of said memory cell arrays adjacent to each other; forming afirst insulating film so as to fill spaces between said memory celltransistors, between said memory cell transistors and said selecttransistors and between said select transistors disposed at the ends ofsaid memory cell arrays adjacent to each other; removing said firstinsulating film so that sidewall films having a first predeterminedvalue of film thickness are formed between said select transistors onthe sidewall thereof; forming a second diffused layer on the surface ofsaid semiconductor substrate between said select transistors using saidsidewall films as masks; forming a second insulating film so as to filla space between said sidewall films; removing said sidewall films andsaid second insulating film so that the predetermined heights thereofare reached; forming a third insulating film having a secondpredetermined value of film thickness equal to or greater than saidfirst predetermined value by covering the side surface and bottomsurface of an area between said select transistors; forming a fourthinsulating film on said third insulating film so as to fill a spacebetween said select transistors; creating an opening between said selecttransistors whereby the top surface of said second diffused layer isexposed; and burying a conductive material in said opening to form acontact portion.
 19. The method of manufacturing a semiconductor deviceaccording to claim 18, wherein said opening is formed by etching saidfourth insulating film on the condition that said fourth insulating filmhas a higher selection ratio than said third insulating films so thatthe top surface of the base of said third insulating films is exposed,by etching said third insulating film on the condition that said thirdinsulating film has a higher selection ratio than said fourth insulatingfilm so that the top surface of said second insulating film is exposed,and by etching said second insulating film on the condition that saidsecond insulating film has a higher selection ratio than said thirdinsulating film so that the top surface of said second diffused layer isexposed.
 20. The method of manufacturing a semiconductor deviceaccording to claim 18, wherein said first, second and third insulatingfilms are silicon dioxide films and said third insulating film is asilicon nitride film.